电子气体 | |||||
气体品种 | 纯度(%) | 气体品种 | 纯度(%) | 气体品种 | 纯度(%) |
NF3 | ≥99.9 | BF3 | ≥99.9 | CF4 | ≥99.99 |
SiF4 | ≥99.99 | SF6 | ≥99.99 | WF6 | ≥99.9995 |
C2H6 | ≥99.96 | CHF3 | ≥99.95 | BCl3 | ≥99.999 |
Cl2 | ≥99.999 | HCl | ≥99.999 | SiH2Cl2 | ≥99.0 |
SiHCl3 | ≥99.0 | SiH4 | ≥99.996 | PH3 | ≥99.9997 |
AsH3 | ≥99.999 | HBr | ≥99.998 | HF | ≥99.9 |
Si2H6 | ≥99.8 | SiCl4 | ≥99.99 | C4F8 | ≥99.999 |
NH3 | ≥99.999 | N2O | ≥99.999 | C3F8 | ≥99.0 |